| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a carbon-based substrate in which a fine concavo-convex structure having a width (pitch) of nanometer order or sub-micrometer order is formed in the surface, human hand can be prevented from touching the fine concavo-convex structure during the assembling work, or the like, and thereby destruction of the fine concavo-convex structure can be prevented and high heat dissipation performance is maintained. <P>SOLUTION: In the carbon-based substrate 1, protrusions 3 having a height of millimeter order and a width of sub-millimeter order are provided at intervals of millimeter order in the surface. A fine concavo-convex structure 2 having a width (pitch) of nanometer order or sub-micrometer order and a depth of sub-micrometer order are formed in the surface between the protrusions. <P>COPYRIGHT: (C)2012,JPO&INPIT |
