| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and method for producing a single crystal, wherein optimum magnetic fields can be formed on upper and lower sides of a coil, respectively, in an induction-heating coil. <P>SOLUTION: The induction-heating coil 24 and a current-supplying unit are provided, wherein: the induction-heating coil consists of an upper surface-side coil 24a and a lower surface-side coil 24b, and heats and melts a silicon-material bar 12 to grow a silicon single crystal 32; and the current-supplying unit supplies high-frequency currents independently to the upper surface-side coil 24a and the lower surface-side coil 24b, respectively. Then the high-frequency currents are supplied independently to the upper surface-side coil 24a and the lower surface-side coil 24b, respectively, in the induction-heating coil 24, thereby growing the silicon single crystal 32 by heating and melting the silicon material bar 12. <P>COPYRIGHT: (C)2012,JPO&INPIT |
