| 摘要 |
<P>PROBLEM TO BE SOLVED: To adjust flatness of a tip of a probe needle with high accuracy and suppress deflection due to a negative pressure so as to perform an accurate inspection. <P>SOLUTION: A wiring board adjustment jig for correcting flatness of a tip of a probe needle is an inspection device comprising: a connection unit; and a probe card. The connection unit includes: a pogo pin block; and a pogo pin block supporting section. The probe card includes: a wiring board, to which a plurality of probe needles are mounted; a wiring board supporting section that supports the wiring board and maintains a pogo pin block side of the wiring board at a negative pressure; and an anchor for supporting the wiring board against the negative pressure. The wiring board adjustment jig comprises: a mounting hole for a pogo pin disposed on the pogo pin block; the pogo pin mounted to the mounting hole for the pog pin; and a sucking means for generating the negative pressure at the pogo pin block side of the wiring board. The wiring board adjustment jig vacuums by the sucking means so as to reproduce deformation of the wiring board in actual usage thereof during an inspection. In addition, other inventions are a wiring board correction method using the wiring board adjustment jig, an inspection method and an inspection system. <P>COPYRIGHT: (C)2012,JPO&INPIT |
