METHOD FOR JOINING SUBSTRATES

摘要

The invention relates to a method for joining substrates. The aim of the invention is to join together substrates consisting of substrate materials without having to spend added time and effort to apply a coating in coating processes to be additionally carried out and to also achieve a good joint quality. In the method according to the invention, a pretreatment of at least one joint surface of a substrate to be joined is carried out in a low-pressure oxygen plasma prior to the actual joining process. During the joining process, a pressing force ranging from 2 kPa to 5 MPa acts on the substrates to be joined, and a heat treatment is carried out at an increased temperature of at least 100 °C and at negative pressure conditions of maximally 10 mbar, preferably -3 mbar.