摘要 |
A pyroelectric element (10) is provided with a pyroelectric substrate (20), which is a single crystal substrate of lithium tantalate having an X axis, Y axis and Z axis for crystal axes, front surface electrodes (41, 42) provided on the pyroelectric substrate (20), and back surface electrodes (51, 52) forming pairs with the front surface electrodes (41, 42), respectively. The pyroelectric substrate (20) is a Y off-cut plate cut out of single crystal lithium tantalate at an angle rotated a cut angle ? in the Z axis direction from the Y axis, around the X axis, which matches the direction along the electrode surfaces. The cut angle ? is 30 - 60°or 120 - 150°. The thickness of the pyroelectric substrate (20) is preferably 10 µm or less and more preferably 5 - 10 µm.
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申请人 |
NGK INSULATORS, LTD.;TAI, TOMOYOSHI;SUZUKI, KENJI;KONDO, JUNGO |
发明人 |
TAI, TOMOYOSHI;SUZUKI, KENJI;KONDO, JUNGO |