METHOD FOR REAL-TIME MEASURING PARTICLES WITH SIGNAL ANALYSIS

摘要

PURPOSE: A real-time particle measuring method through a signal analysis is provided to obtain the precision and reliability of a measurement and to obtain a real-time particle measurement through a signal analysis. CONSTITUTION: A real-time particle measuring method through a signal analysis is as follows. A particle size distribution is divided into a plurality of channel sections(S110). Ranges of a loss can be generated when arbitrary particles being included in each channel section passes through a position of an inspection bean having a largest light-intensity are predicted per each channel section, thereby providing a prediction loss range(S120). A frequency distribution of light-intensity losses generated by particles of a specific size is measured per each channel section and a rate in which the frequency distribution of the measured losses can be within each prediction loss range is obtained so that reference data is obtained(S130). Particles to be actually measured are injected into a chamber and compares an actual light-intensity lose with the reference data, thereby information of a particle to be measured(S140).