| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce a testing cost and facilitate accuracy management of a test of a testing jig and coplanarity testing equipment. <P>SOLUTION: On the reflection plane formation side 96 of a glass board 92 of the testing jig 90, aluminum is evaporated in respective regions corresponding to a plurality of leads of QFP to form a plurality of reflection planes 98. With a supported plane on the opposite side from the reflection plane formation side 96 of the glass board 92 being supported by a suction nozzle, the testing jig 90 is moved above a testing head of the coplanarity testing equipment. Information on the height of the testing jig 90 is supplied to a mounting system controller based on irradiation of laser light on the reflection planes 98 and entrance of reflected light into a detecting element. The testing jig 90 is fabricated with such an accuracy that, for example, it can be known that the coplanarity testing equipment is not in a state qualified for testing coplanarity correctly if all the heights of the plurality of reflection planes 98 exceed a set value of height which is supposed to be obtained. <P>COPYRIGHT: (C)2009,JPO&INPIT |
