发明名称 Zinc-tin oxide thin-film transistors
摘要 Methods of forming transparent zinc-tin oxide structures are described. Devices that include transparent zinc-tin oxide structures as at least one of a channel layer in a transistor or a transparent film disposed over an electrical device that is at a substrate.
申请公布号 US8252697(B2) 申请公布日期 2012.08.28
申请号 US20070803261 申请日期 2007.05.14
申请人 AHN KIE Y.;FORBES LEONARD;MICRON TECHNOLOGY, INC. 发明人 AHN KIE Y.;FORBES LEONARD
分类号 H01L21/31;H01L21/469 主分类号 H01L21/31
代理机构 代理人
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