发明名称 MOS device with varying trench depth
摘要 A semiconductor device includes a drain region comprising an epitaxial layer, a body disposed in the epitaxial layer, a source embedded in the body, a gate trench extending into the epitaxial layer, a gate disposed in the gate trench, an active region contact trench extending through the source, and an active region contact electrode disposed within the active region contact trench. The active region contact trench has a first width associated with a first region that is in proximity to a bottom portion of the body and a second width associated with a second region that is in proximity to a bottom portion of the source. The first width is substantially different from the second width.
申请公布号 US8253192(B2) 申请公布日期 2012.08.28
申请号 US201113088275 申请日期 2011.04.15
申请人 BHALLA ANUP;WANG XIAOBIN;ALPHA AND OMEGA SEMICONDUCTOR INCORPORATED 发明人 BHALLA ANUP;WANG XIAOBIN
分类号 H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L29/76
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