发明名称 |
Method and apparatus for high rate, uniform plasma processing of three-dimensional objects |
摘要 |
A method of performing plasma immersion ion processing (PIIP), particularly suited for processing three-dimensional objects. One or more such objects are placed in a conductive cage having solid or mesh walls. The cage completely encloses the objects. A voltage is applied to the cage, and the plasma is generated, resulting in the plasma being contained within the cage. |
申请公布号 |
US8252388(B2) |
申请公布日期 |
2012.08.28 |
申请号 |
US20080121410 |
申请日期 |
2008.05.15 |
申请人 |
WEI RONGHUA;RINCON CHRIS;LANGA EDWARD;SOUTHWEST RESEARCH INSTITUTE |
发明人 |
WEI RONGHUA;RINCON CHRIS;LANGA EDWARD |
分类号 |
B01J19/08 |
主分类号 |
B01J19/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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