发明名称 FLUID BED REACTOR
摘要 Fluidized bed reactor systems for producing high purity silicon-coated particles are disclosed. A vessel has an outer wall, an insulation layer inwardly of the outer wall, at least one heater positioned inwardly of the insulation layer, a removable concentric liner inwardly of the heater, a central inlet nozzle, a plurality of fluidization nozzles, at least one cooling gas nozzle, and at least one product outlet. The system may include a removable concentric sleeve inwardly of the liner. In particular systems the central inlet nozzle is configured to produce a primary gas vertical plume centrally in the reactor chamber to minimize silicon deposition on reactor surfaces.
申请公布号 KR20120094038(A) 申请公布日期 2012.08.23
申请号 KR20127015449 申请日期 2010.11.17
申请人 REC SILICON INC. 发明人 OSBORNE E. WAYNE;SPANGLER MICHAEL V.;ALLEN LEVI C.;GEERTSEN ROBERT J.;EGE PAUL E.;STUPIN WALTER J.;ZEININGER GERALD
分类号 C23C16/442;C23C16/44 主分类号 C23C16/442
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