摘要 |
<P>PROBLEM TO BE SOLVED: To provide a granular gallium oxide which is fine, has a large BET specific surface area, and hard to collapse, when fed to apparatuses for producing single crystal substrates and the like as a raw material. <P>SOLUTION: The method for producing granular gallium oxide comprises a step of obtaining gallium hydroxide by mixing an aqueous solution of gallium nitrate having concentration of not more than 1.5 mol/L and a basic solution while adjusting the pH in the range of 8-10; a heat treatment step of obtaining gallium oxyhydroxide by keeping the resultant gallium hydroxide at a temperature of not lower than 60°C at a pH of 8-10 for not less than one hour; and a step of obtaining granular gallium oxyhydroxide by granulating the gallium oxyhydroxide obtained in the heat treatment step; and a step of obtaining the granular gallium oxide by firing the granular gallium oxyhydroxide. <P>COPYRIGHT: (C)2012,JPO&INPIT |