The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element (16) made of semiconductor material comprising n-type doping agent and excitation or sensing means (10, 14) functionally connected to said oscillating or deflecting element (16). According to the invention, the oscillating or deflecting element (16) is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.
申请公布号
WO2012110708(A1)
申请公布日期
2012.08.23
申请号
WO2012FI50157
申请日期
2012.02.17
申请人
TEKNOLOGIAN TUTKIMUSKESKUS VTT;PENSALA, TUOMAS;JAAKKOLA, ANTTI;GANCHENKOVA, MARIA;PRUNNILA, MIKA;KIIHAMAEKI, JYRKI
发明人
PENSALA, TUOMAS;JAAKKOLA, ANTTI;GANCHENKOVA, MARIA;PRUNNILA, MIKA;KIIHAMAEKI, JYRKI