发明名称 SPUTTERING TARGET, COMPOUND SEMICONDUCTOR THIN FILM, SOLAR CELL HAVING COMPOUND SEMICONDUCTOR THIN FILM, AND METHOD FOR MANUFACTURING COMPOUND SEMICONDUCTOR THIN FILM
摘要 <p>The present invention provides a sputtering target which comprises an alkali metal, a Ib group element, a IIIb group element, and a VIb group element, and has a chalcopyrite crystal structure. Provided is a sputtering target comprising Ib-IIIb-VIb group elements and having a chalcopyrite crystal structure, which is suitable for producing, via a single sputtering process, a light-absorbing layer comprising the Ib-IIIb-VIb group elements and having the chalcopyrite crystal structure.</p>
申请公布号 KR20120094075(A) 申请公布日期 2012.08.23
申请号 KR20127016837 申请日期 2010.12.03
申请人 JX NIPPON MINING & METALS CORPORATION 发明人 IKISAWA MASAKATSU;TAKAMI HIDEO;TAMURA TOMOYA
分类号 C23C14/34;H01L31/04 主分类号 C23C14/34
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