SINGLE AND DUAL STAGE WAFER CUSHION AND WAFER SEPARATOR

摘要

A wafer separator comprising: an outer peripheral portion; said outer peripheral portion having a top surface and a bottom surface; cushion having essentially a ring shape; a middle surface having a diameter that is less than said outer peripheral portion and being disposed between said top surface and said bottom surface for placement of a wafer; said middle surface extends to an inside diameter that provides and open central area, and at least one vent disposed on said bottom surface that extends from said inside diameter to said outer peripheral portion.