APPRATUS FOR CLEANING AND DRY MASK PICK AND METHOD FOR CLEANING PARTICLE OF MASK PICK USING THE SAME

摘要

PURPOSE: An apparatus capable of cleaning and drying a mask pick and a particle elimination method of the mask pick using the same are provided to effectively eliminate portability particle generated in the mask pick. CONSTITUTION: A clamp jig(350) fixes a mask pick. A cleaning bath(400) accepts a cleaning fluid(440). A bundle(300) of the mask pick is fixed inside the cleaning bath. A holder jig(380) fixes the clamp jig at the sidewall inside the cleaning bath. A cleaning die(410) comprises a controller and circulating equipment which efficiently can circulate the cleaning fluid. The controller controls cleaning time. A drying unit dries the mask pick. The drying unit comprises a lamp for temperature control. A fixing shaft passes through a handle of the mask pick.