,申请号JP20080537865-传众专利搜索

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发明名称
摘要
申请公布号	JP5006331(B2)	申请公布日期	2012.08.22
申请号	JP20080537865	申请日期	2006.10.25
申请人		发明人
分类号	H01L21/66;G01N21/00;G01N21/27;G01N21/39;G01N21/47	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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