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发明名称
METHOD AND APPARATUS FOR PRODUCTION OF ROTATABLE SPUTTERING TARGETS
摘要
申请公布号
EP2488677(A1)
申请公布日期
2012.08.22
申请号
EP20100768461
申请日期
2010.10.12
申请人
GRADEL S.A.R.L.
发明人
MENDEL, ANTHONY;WHALEN, GEORGE E.
分类号
C23C14/34;B22D19/16
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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