| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure apparatus which prevents the leakage of a liquid filled into the optical-path space of its exposure light. <P>SOLUTION: The exposure apparatus EX has: recovering ports 22 for recovering a liquid LQ; blowing-off ports 32 for blowing off a gas therefrom, each being provided on the outside of each recovering port 22 relative to an optical-path space K1; and exhausting ports 42 for exhausting at least a portion of the gas blown off from the blowing-off ports 32, each being provided between each recovering port 22 and each blowing-off port 32. <P>COPYRIGHT: (C)2007,JPO&INPIT |
