TRAY, SUBSTRATE PROCESSING APPARATUS USING THE SAME

摘要

PURPOSE: A tray and a substrate processing device using the same are provided to prevent a process failure due to the sag of a guide frame by installing a sag preventing member. CONSTITUTION: A substrate support plate(110) supports a plurality of substrates. A guide frame(120) supports a support plate to be lifted. The guide frame includes a plurality of alignment member penetration holes(128). A plurality of cover brackets(130) are regularly installed along the upper side of the sidewall of the guide frame. A sag preventing member is installed on the side of the guide frame and prevents the sag of the guide frame.