SUBSTRATE TRANSFER SYSTEM WITH HORIZONTAL MULTI-JOINT TYPE ARM

摘要

PURPOSE: A substrate transfer device including a horizontal multi-joint arm is provided to reduce the size of a load applied to one arm driving motor by decreasing the number of joints driven by each arm driving motor. CONSTITUTION: A bottom link(300) includes an arm driving unit(100) with a first arm driving motor(111) and a second arm driving motor(121). A first arm(400) is combined with one end of the bottom link by a rotary joint. A second arm(500) is combined with the other end of the bottom link by the rotary joint. A bottom link rotation motor rotates the bottom link. Two arm driving motors implement a linear movement by synchronizing with the bottom link rotation motor.