| 摘要 |
PURPOSE: An automatic substrate inspection device and a method using air floating of a substrate are provided to inspect a substrate by floating the substrate with air, thereby preventing the generation of particles or scratches or static on a frictional surface. CONSTITUTION: An automatic substrate inspection device comprises an ASU(Air Slider Unit)(110), a transferring device(120), a plurality of aligning cameras(150), a plurality of inspecting cameras(140), a plurality of lighting devices(130), and a controlling device. The ASU comprises a plate in which an air discharging hole and an air suction hole are periodically formed and floats a substrate on the plate with air. The transferring device fixes the floated substrate and transfers the substrate from side to side. The controlling device recognizes a reference position of the substrate with the plurality of aligning cameras according to control commands generated by an input of a user and transfers the substrate to a pre-set inspection area by controlling the transferring device. The controlling device obtains images of the inspection area by controlling the plurality of lighting devices and the plurality of inspecting cameras in the inspection area, compares the obtained images with reference images, and outputs inspection information according to a comparison result.
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