| 摘要 |
PURPOSE: A laser irradiator and a laser processing apparatus are provided to trace the processing-transfer speed of a laser processing apparatus and regulate the output of a laser beam for irradiating a work piece. CONSTITUTION: A laser irradiator comprises a laser beam generator(61), a condensing unit(62), and an output control unit(63) arranged between the laser beam generator and the condensing unit. The output control unit comprises a 1/2 wave plate, a prism having first and second polarized beam splitter diaphragms, an optical path length controller having a piezoelectric actuator arranged opposite to the first polarized beam splitter diaphragm, a polarized light synthesizer creating a phase difference between S- and P-polarized lights arranged opposite to the second polarized beam splitter diaphragm, a polarized beam splitter dividing the laser beam synthesized by the polarized beam synthesizer into optical paths connected to the condensing unit and a beam damper, and a controller controlling the voltage applied to the piezoelectric actuator. |
