SHOWER HEAD AND CHEMICAL VAPOR DEPOSITION DEVICE HAVING THE SAME

摘要

PURPOSE: A shower head and a chemical vapor deposition apparatus using the same are provided to reduce costs required for the manufacture, maintenance, and repair of the shower head by detachably combining a plurality of gas chambers with a supporting plate. CONSTITUTION: A plurality of gas chambers(220) is detachably combined with a supporting plate by a coupling screw. A gas supply pipe(240) is branched to the plurality of gas chambers. The gas supply pipe supplies process gas. A plurality of refrigerant circulation paths(270) is respectively installed in the plurality of gas chambers. The plurality of refrigerant circulation paths circulates refrigerant. A refrigerant discharge pipe discharges the refrigerant discharged in the plurality of refrigerant circulation paths. A plurality of sealing members is respectively installed between the supporting plate and the plurality of gas chambers.