CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of restraining visual field deviation occurring when a surface of an inclined specimen is observed with a tilt beam and a right and left parallactic angle image while a focal point is continuously corrected.

SOLUTION: An aligner 54 for correcting a visual field is provided at an intermediate part of an objective lens 7 connecting a focal point of a primary charged particle beam with a surface of a specimen 10 and an inclined angle controlling deflector 53 for tilting the primary charged particle beam. Visual field deviation occurring during tilting the primary charged particle beam is corrected in connection with correction of a focal point of the objective lens 7 by a correction amount found from a tilt angle of the inclined angle controlling deflector 53, a lens condition, and a distance between the objective lens 7 and the specimen 10.

COPYRIGHT: (C)2012,JPO&INPIT