| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow sensor which can easily inspect the symmetric property of a diaphragm, and a manufacturing method of the flow sensor. <P>SOLUTION: A flow sensor comprises a detecting portion 21; a diaphragm portion 201 provided with the detecting portion 21; a substrate 20 having an upstream side through-hole 28 formed on an upstream side of the diaphragm portion 201, and a downstream side through-hole 29 formed on a downstream side of the diaphragm portion 201; and a first marker set disposed symmetrically about a design center set at the diaphragm portion 201 in a plane view. The first marker set includes a maker 211 provided exceeding a design line for defining an outline of the upstream side of the diaphragm portion 201 of design lines set at the diaphragm portion 201 in the plane view, and a marker 212 provided exceeding the design line for defining an outline of the downstream side of the diaphragm portion 201. <P>COPYRIGHT: (C)2012,JPO&INPIT |
