| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect the displacement of a workpiece from a chuck table. <P>SOLUTION: The grinding device comprises a holding means in which a holding face for holding the workpiece is formed, and a processing means which grinds the workpiece held by the holding means. The grinding device also comprises a displacement detection means which detects a displacement when the workpiece transported in a prescribed position of the holding face is displaced from the prescribed position during grinding. The displacement detection means comprises: an irradiation part which irradiates detection light to the vicinity of the edge of the workpiece; a light receiving part which receives the detection light reflected by the workpiece; an operation part which calculates the displacement of the workpiece on the basis of the light receiving of the light receiving part; and a control part which continues the grinding when the displacement calculated at the operation part is below a preset threshold, and stops the grinding when the displacement exceeds the preset threshold. <P>COPYRIGHT: (C)2012,JPO&INPIT |
