发明名称 OSCILLATION CIRCUIT AND VIBRATION TYPE SENSOR USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide an oscillation circuit capable of realizing stable oscillation of the oscillation circuit by reducing the effect of parasitic resistance and parasitic capacitance of a vibrator on the resonance characteristic (Q value, gain, etc.), with improved measurement accuracy of a vibration type sensor, and to provide the vibration type sensor using the same. <P>SOLUTION: A current voltage conversion circuit which converts an output current signal of an electrostatic drive type vibrator (fixed electrode 1 and vibrator 3) to a voltage signal includes a calculation amplifier 14 and a negative impedance conversion circuit 10 equipped with resistors 11, 12, and 13. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012156946(A) 申请公布日期 2012.08.16
申请号 JP20110016587 申请日期 2011.01.28
申请人 YOKOGAWA ELECTRIC CORP 发明人 OSHIMA AKIHIRO
分类号 H03B5/30;G01L9/00;H01L29/84;H01L41/08;H01L41/18;H01L41/187;H03B5/36 主分类号 H03B5/30
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