| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sheet for a film forming apparatus capable of securing a stable peeling preventing function even for two or more kinds of film forming materials, and a method of manufacturing the same. <P>SOLUTION: The sheet S for a film forming apparatus includes a metallic sheet base material 1, a plurality of projection parts 21 and an uneven part 22. The sheet base material 1 is bendable into an optional shape. The projection parts 21 are formed on a surface of the sheet base material 1 and are distributed in an island shape within the surface. The uneven part 22 is formed on the surface of the sheet base material 1 and the surfaces of the projection parts 21. The projection part 21 is deformable by prescribed or more film stress of a film forming material and suppresses peeling of the film forming material such as an oxide material with relatively high film stress for instance. The uneven part 22 is formed more finely than the projection part 21, and by securing high adhesion with the film forming material, suppresses peeling of the film forming material such as a metal film with relatively high hardness. <P>COPYRIGHT: (C)2012,JPO&INPIT |
