| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate storage case for individually storing and unpacking a large plate-like substrate with a simple method while keeping safety and cleanliness. <P>SOLUTION: In this substrate storage case comprising a lower bottom part on which a plurality of substrate receiving pins for horizontally placing the plate-like substrate are provided and to the fringe side part of which a side wall is added, and a lid part having the fringe side part to get engaged with the side wall of the lower bottom part, substrate holding jigs for holding the end parts of respective sides of the substrate by connecting them to the prescribed position of the lower bottom part are provided, among these substrate holding jigs, at least two substrate holding jigs concerning two sides holding at least one corner between them are slide type substrate holding jigs slidable in such a direction to push the end part of the substrate toward the center of the substrate, a pushing-in jig sliding the slide type substrate holding jig is provided perpendicularly to the lid part at the prescribed position of the lid part facing the slide type substrate holding jig, and a mechanism for the pushing-in jig to push the slide type substrate holding jig toward the center of the substrate when the lid part is closed is provided. <P>COPYRIGHT: (C)2012,JPO&INPIT |
