发明名称 |
THIN FILM TRANSISTOR ARRAY AND METHOD OF MANUFACTURING THE SAME |
摘要 |
A method of manufacturing a thin film transistor array substrate includes: forming a gate pattern on a substrate; forming a first gate insulating film and a second gate insulating film on the substrate; forming a source/drain pattern and a semiconductor pattern on the substrate; forming a passivation film on the substrate; forming a photo-resist pattern on the passivation film; patterning the passivation film using the photo-resist pattern to form a passivation film pattern, the patterning of the passivation film including over-etching the passivation film to form an open region in the passivation film; forming a transparent electrode film on the substrate; removing the photo-resist pattern and a portion of the transparent electrode film on the photo-resist pattern; and forming a pixel electrode on the first gate insulating layer. |
申请公布号 |
US2012208330(A1) |
申请公布日期 |
2012.08.16 |
申请号 |
US201213450643 |
申请日期 |
2012.04.19 |
申请人 |
JEONG KI-HUN;SHIM SEUNG-HWAN;KIM JOO-HAN;CHIN HONG-KEE;SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
JEONG KI-HUN;SHIM SEUNG-HWAN;KIM JOO-HAN;CHIN HONG-KEE |
分类号 |
H01L21/336 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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