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发明名称
CVD APPARATUS
摘要
申请公布号
EP2486167(A1)
申请公布日期
2012.08.15
申请号
EP20100771254
申请日期
2010.10.08
申请人
HEMLOCK SEMICONDUCTOR CORPORATION
发明人
HILLABRAND, DAVID;MCCOY, KEITH
分类号
C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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