| 摘要 |
An apparatus for preventing collision of an ejector is provided to protect components of a wafer table and an ejector by preventing collision of the wafer table and the ejector due to a software error or a data input error. A wafer including chips is loaded on a wafer table(200). A table driving assembly moves the wafer table. An ejector(300) is installed inside the wafer table to support the chips of the wafer in a wafer pickup process. A plurality of first and second terminals are installed in a constant interval inside the wafer table and are respectively connected with a microcomputer. A switching member is formed in a constant interval along an inner wall of an inner spacer of the wafer table. The switching member is formed with an elastic material and connects the first and the second terminals to each other in a contacting state with the ejector. |
