发明名称 |
Cantilever-type micro contact probe with hinge structure |
摘要 |
According to the present invention, allowable displacement can be increased from an excellent stress relaxation effect achieved by applying a hinge structure while adopting advantages of a dual beam cantilever-type probe that can reduce scrub. Since the hinge structure is a structure that does not receive a moment, an effect that is the same as eliminating a moment in a conventional prove can be achieved so that stress can be evenly applied and the allowable displacement of the probe can be increased. |
申请公布号 |
US8242797(B2) |
申请公布日期 |
2012.08.14 |
申请号 |
US20090452730 |
申请日期 |
2009.02.24 |
申请人 |
KIM JUNG-YUP;LEE HAK-JOO;KIM KYUNG-SHIK;KOREA INSTITUTE OF MACHINERY & MATERIALS |
发明人 |
KIM JUNG-YUP;LEE HAK-JOO;KIM KYUNG-SHIK |
分类号 |
G01R31/02 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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