发明名称 A METHOD OF INITIATING MOLECULAR BONDING
摘要 A method of initiating molecular bonding, comprising bringing one face of a first wafer to face one face of a second wafer and initiating a point of contact between the two facing faces. The point of contact is initiated by application to one of the two wafers, for example, using a bearing element of a tool, of a mechanical pressure in the range from 0.1 MPa to 33.3 MPa.
申请公布号 KR20120089695(A) 申请公布日期 2012.08.13
申请号 KR20127011092 申请日期 2009.08.06
申请人 SOITEC 发明人 CASTEX ARNAUD;BROEKAART MARCEL
分类号 H01L21/48;H01L21/50 主分类号 H01L21/48
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