| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress an effect of static electricity on a capacitance detecting circuit or the like of a sensor interior, improve the reliability of the sensor, and stably detect the fingerprint coming into contact with the surface of the sensor at a high sensitivity in the electrostatic capacitance detecting type fingerprint reading sensor configured by disposing a plurality of sensor electrodes on an insulating layer, wrapping the upper face and the side faces of the plurality of sensor electrodes with a passivation film, and further surrounding the four sides of each sensor electrode with a discharge layer comprising a metal pattern. <P>SOLUTION: In the electrostatic capacitance detecting type fingerprint reading sensor, the passivation film is formed into by accumulating silicone oxynitride a thick film by a PECVD method, a discharge layer is formed on the upper face of the passivation film, and a concentrated part of the electric field distribution is formed on one or two sets of discharge layers aligned in an opposed state out of discharge layers surrounding the four sides of the sensor electrodes. <P>COPYRIGHT: (C)2012,JPO&INPIT |
