| 摘要 |
<P>PROBLEM TO BE SOLVED: To radiate plural types of X-rays to an object to be inspected and facilitate timing control in detecting the plural types of X-rays. <P>SOLUTION: An X-ray inspection apparatus includes: a single microwave source 2; a splitting means 3 for splitting a microwave generated from the microwave source 2 into plural microwaves; an each-type-of-X-ray generation means 4 for generating each type of X-rays having a different wavelength by taking in each microwave split by the splitting means 3 and accelerating each electron beam to a different speed, and for radiating each type of X-rays to different positions in a direction for conveying an object P to be inspected conveyed at a predetermined speed; an each-type-of-X-ray detection means 5 for detecting each type of X-rays having passed through the object P to be inspected to obtain an image by each type of X-rays on the basis of each type of X-rays; and an image processing means 6 for storing the image by each type of X-rays obtained by the each-type-of-X-ray detection means 5, and for extracting an image of the same cross section by each type of X-rays obtained by each type of X-rays having passed through the same point of the object P to be inspected on the basis of the predetermined speed for conveying the object P to be inspected. <P>COPYRIGHT: (C)2012,JPO&INPIT |
