BOAT FOR SUPPORTING SUBSTRATE AND SUPPORT UNIT USING SAME

摘要

Disclosed are a boat for supporting a substrate and a support unit using same. The boat for supporting a substrate and a support unit using same according to the present invention enable the entire surface of the substrate to be supported uniformly using a plurality of first support pins and second support pins, thereby preventing the sagging of the substrate due to tare thereof when treating the substrate. Therefore, the reliability of the treatment process for the substrate is enhanced because the substrate does not experience change in characteristics even when treated.