发明名称 |
BOAT FOR SUPPORTING SUBSTRATE AND SUPPORT UNIT USING THE SAME |
摘要 |
PURPOSE: A boat for supporting a substrate and a support unit using the same are provided to prevent the substrate from sloping by uniformly supporting the entire surface of the substrate using a number of first and second supporting pins. CONSTITUTION: A pair of main bars(161) is faced each other. A plurality of connecting bars(171) mutually connect the pair of main bars. A number of first supporting pins are installed on the main bar. A substrate is mounted on the first supporting pins. An arc shaped supporting piece is formed on the one end part of the main bar in the shape of a half circle.
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申请公布号 |
KR20120089192(A) |
申请公布日期 |
2012.08.09 |
申请号 |
KR20120006023 |
申请日期 |
2012.01.19 |
申请人 |
TERASEMICON CORPORATION |
发明人 |
KANG, HO YOUNG;PARK, KYOUNG WAN |
分类号 |
H01L21/673;G02F1/13;H01L21/324;H01L21/683 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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