发明名称 |
APPARATUS AND METHOD FOR SAMPLE PREPARATION |
摘要 |
A sample stage for processing a sample in an ion beam etching apparatus has positioning arrangements each having a receiving apparatus and a mask, a sample being mountable in the receiving apparatus with reference to an ion beam and positionable relative to the mask. The sample stage includes a mechanism that enables a switchover between respective positioning arrangements so a selected positioning arrangement is respectively orientable toward the ion beam. The sample in the selected positioning arrangement is exposed to the ion beam while the remaining positioning arrangements face away from the ion beam. The positioning arrangements are arranged in one common vessel. A method for sequential preparation of at least two samples in an ion beam etching unit using the sample stage is also disclosed. |
申请公布号 |
US2012199552(A1) |
申请公布日期 |
2012.08.09 |
申请号 |
US201213368414 |
申请日期 |
2012.02.08 |
申请人 |
PFEIFER THOMAS;PLANK HEINZ;LEICA MIKROSYSTEME GMBH |
发明人 |
PFEIFER THOMAS;PLANK HEINZ |
分类号 |
B44C1/22 |
主分类号 |
B44C1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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