| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a temperature control device that can achieve energy saving while suppressing degradation of measurement accuracy by preventing variation of pressure in a booth arranged with a precision apparatus. <P>SOLUTION: In the temperature control device E including a control means 3 to control of operation of a temperature control means 2 to control temperature by supplying air P for temperature control into a booth 1 arranged with a precision apparatus F, a pressure detection means 9 to detect pressure K<SB POS="POST">1</SB>in the booth 1 is arranged in the booth 1; the temperature control means 2 includes a blast means 4 to feed the air P for temperature control into the booth 1; the control means 3 operates the blast means 4 to feed the air P for temperature control into the booth 1 and sets the pressure K<SB POS="POST">1</SB>in the booth 1 at pressure larger than the atmospheric pressure K<SB POS="POST">0</SB>, causes the pressure detection means 9 to detect reference pressure K<SB POS="POST">1a</SB>being the pressure K<SB POS="POST">1</SB>in the booth 1 at operation start time t1 of the precision apparatus F or before the operation start, and controls the operation of the blast means 4 to keep the pressure K<SB POS="POST">1</SB>in the booth 1 at the reference pressure K<SB POS="POST">1a</SB>from the operation start time t1 of the precision apparatus F to the operation stop t2 thereof. <P>COPYRIGHT: (C)2012,JPO&INPIT |
