METHOD OF FORMING SEMICONDUCTOR DEVICE HAVING SELF-ALIGNED PLUG

摘要

PURPOSE: A manufacturing method of a semiconductor device having a self-aligned plug is provided to have good electrical properties by forming lower electrodes and data storage plugs on a semiconductor substrate. CONSTITUTION: A conductive pattern is formed on a semiconductor substrate(31). An insulating layer with an opening part(549G) exposing the conductive pattern is formed. A data storage plug is formed on a lower electrode(551) and a spacer(550). The data storage plug includes a first side wall and a second side wall.