| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sample positioning device of a charged particle beam apparatus which can prevent a sample from drifting. <P>SOLUTION: A sample positioning device 100 of a charged particle beam apparatus includes: a sample chamber 1 which can be kept in a depressurized state; a tubular member 10 which has a hole 12 communicating to the sample chamber 1; a sample holder 20 which is movably attached in the hole 12; an o-ring 30 which is attached to the sample holder 20 and comes into contact with an inner face of the tubular member 10; and a drive mechanism 60 which changes the position of the sample holder 20 in the sample chamber 1. The sample holder 20 has: a first area 22 whose tip is arranged in the sample chamber 1; and a second area 24 which is arranged in the hole 12. The first area 22 has, at its tip, a sample holding part 23 which can hold a sample S. The second area 24 movably supports the first area 22 via a linear guide. The o-ring 30 is attached to the second area 24. The drive mechanism 60 moves the first area 22. <P>COPYRIGHT: (C)2012,JPO&INPIT |
