发明名称 |
RETICLE PROTECTION MEMBER, RETICLE CARRYING DEVICE, EXPOSURE DEVICE AND METHOD FOR CARRYING RETICLE |
摘要 |
A position measurement device measures the position of a position measurement mark formed on the lower surface of a reticle, thereby measuring the position of the reticle. A position measurement device measures the position of the position measurement mark formed on the lower surface of a lower lid, thereby measuring the position of the lower lid. The relative displacement of the reticle and lower lid is known when the position of the reticle and the position of the lower lid are known. Therefore, when the lower lid having the reticle loaded thereon is carried with a carrying device and set in an exposure device, the stop position of the lower lid is determined by taking this displacement into account. As a result, the reticle can be correctly set in the exposure device. |
申请公布号 |
US2012200835(A1) |
申请公布日期 |
2012.08.09 |
申请号 |
US201213446436 |
申请日期 |
2012.04.13 |
申请人 |
SUZUKI MOTOKO;OKUBO YUKIHARU |
发明人 |
SUZUKI MOTOKO;OKUBO YUKIHARU |
分类号 |
G03B27/52;G03F1/24;G03F1/66;H01L21/027 |
主分类号 |
G03B27/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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