| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of executing high-accuracy laser beam machining. <P>SOLUTION: The laser beam machining apparatus includes a laser oscillator 41 for generating the laser beam L, an XY scanner 47 to scan the irradiation position of the laser beam L on a workpiece W in the XY direction, a telecentric lens 48 for realizing the constant outgoing angle of the laser beam L outgoing toward the workpiece W irrespective of the angle of incidence of the laser beam L to be incident from the XY scanner 47, and an integrally formed casing frame 60 for accommodating the laser oscillator 41 and the XY scanner 47. The casing frame 60 has a partition plate 61 arranged across the outgoing optical axis of the laser oscillator 41. <P>COPYRIGHT: (C)2012,JPO&INPIT |
