FLEXIBLE ELECTRODE BASED ON PDMS USING PARYLENE COATING LAYER AND FABRICATION METHOD THEREOF

摘要

PURPOSE: A flexible electrode based on PDMS using a parylene coating layer and a manufacturing method thereof are provided to prevent cracks in a metal electrode by forming the parylene coating layer on a PDMS substrate. CONSTITUTION: A parylene coating layer(100) is formed on a PDMS substrate(20). A metal layer is formed on the parylene coating layer. A photoresist pattern is formed by spreading photoresist on the metal layer. A metal pattern(45) is formed by etching the metal layer. The photoresist pattern is removed.