| 摘要 |
PURPOSE: An atmospheric plasma apparatus for having a plurality of electrodes is provided to simultaneously process various kinds of gases by arranging a plurality of gas supply parts which can supply gas between the electrodes and either side of the plurality of electrodes. CONSTITUTION: A side gas supply part(110) supplies gas on either side of a pair of electrodes(130) which are parallelly arranged. An upper gas supply part(120) supplies the gas between the electrodes. An earth plate(150) is used in order to perform a grounding function. A power supply part(160) is used in order to supply power. The power supply part generally applies RF(Radio Frequency) power to the electrode with a power line(162). The power supply part further includes a matching box(161) for matching the RF power from the power to electrode.
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