CLAMP OF SUPPORTING A SUBSTRATE

摘要

PURPOSE: A substrate supporting clamp is provided to prevent the penetration of precipitate removal solution between arms and a slip member by installing a sealing member in between a pressing unit of the arms and the slip member. CONSTITUTION: A substrate supporting clamp(100) comprises arms(110) and a slip member(120). A pair of the arms is joined to each other by a hinge so that an interval between end parts of the arms is adjusted by external load. A substrate(20) is supported in between the end parts of the arms. The slip member is installed in a surface of a portion of the arms receiving the external load.