发明名称 4F2 self align side wall active phase change memory
摘要 Arrays of memory cells are described along with devices thereof and method for manufacturing. Memory cells described herein include self-aligned side wall memory members comprising an active programmable resistive material. In preferred embodiments the area of the memory cell is 4F2, F being the feature size for a lithographic process used to manufacture the memory cell, and more preferably F being equal to a minimum feature size. Arrays of memory cells described herein include memory cells arranged in a cross point array, the array having a plurality of word lines and source lines arranged in parallel in a first direction and having a plurality of bit lines arranged in parallel in a second direction perpendicular to the first direction.
申请公布号 US8237148(B2) 申请公布日期 2012.08.07
申请号 US20100792604 申请日期 2010.06.02
申请人 LUNG HSIANG-LAN;MACRONIX INTERNATIONAL CO., LTD. 发明人 LUNG HSIANG-LAN
分类号 H01L47/00 主分类号 H01L47/00
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