Method for measuring mirror index and apparatus thereof

摘要

There is provided a method of evaluating quantitatively surface properties such as cleanness and quality of the surface of a work that has been evaluated in the past by visual appearance inspection. A determined pattern 14 is made from plural concentric circles arranged at a center of an object lens in a taking picture device 12. A front edge of a probe is in contact with the surface of a work by the probe 10 that is provided at a middle portion of a cylindrical case 11 in a vertical direction so that the surface of the work and the determined pattern face each other. The determined pattern is illuminated by light of a light source so that a reflected image of the determined pattern is projected onto the surface of the work. A picture of the reflected image is taken by the taking picture device. The resulted image data includes standard deviation of brightness distribution of the resulted image data positioned on radius lines extending in all directions to outside from a center of the ring pattern image. A relative value between the resulted standard deviation and the standard deviation of the amplitude of the brightness distribution of the image data on a plurality of lines of the criteria mirror surface is determined as the mirror index. The image clarity of the surface of the work is evaluated from the mirror index of the plurality of lines.